Influence of Nitrogen Annealing Treatment on Optical, Microstructural, and Chemical Properties of Ga2O3 Film Grown by Plasma-Enhanced Atomic Layer Deposition

Wen Jie Chen, Hong Ping Ma*, Lin Gu, Yi Shen, Ruo Yun Yang, Jie Zhang, Lei Yang, Jingtao Zhu, Qing Chun Zhang*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

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