High-Yield Enhancement-Mode GaN p-FET With Etching-Target Layer and High-Selectivity Etching Techniques

Xuanming Zhang, Yuanlei Zhang, Jiachen Duan, Zhiwei Sun, Weisheng Wang, Ye Liang, Xuelin Yang, Lisheng Zhang, Zhenghao Chen, Jie Zhang, Kain Lu Low*, Wen Liu*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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