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High quality and uniformity GaN grown on 150 mm Si substrate using in-situ NH3 pulse flow cleaning process
Panfeng Ji, Xuelin Yang, Yuxia Feng, Jianpeng Cheng, Jie Zhang, Anqi Hu, Chunyan Song, Shan Wu, Jianfei Shen, Jun Tang, Chun Tao, Yaobo Pan, Xinqiang Wang, Bo Shen*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
7
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(Scopus)