@inproceedings{4810d5474a0345f6aa5a0aa0d94229e8,
title = "Rolled-up SiOx/SiNx microtubes made by PECVD for sensitive solvent detection",
abstract = "This paper reports a highly-sensitive, whispering gallery mode (WGM)-based chemical sensor based on rolled-up microtube optical microcavity (RUM-OM). For the first time, such microcavities were batch-fabricated through rolling up of plasma-enhanced chemical vapor deposition (PECVD)-synthesized SiOx/SiNx bilayer nanomembranes. Benefiting from the high refractive index (RI) of PECVD-deposited SiNx, our RUM-OM showed a significantly improved quality factor (Q-factor: ~880) over that (~50) of SiO/SiO2 RUM-OM with similar geometries. The developed RUM-OM was demonstrated for solvent sensing, providing a limit of detection (LOD) of 1.7 × 10-4 RIU (refractive index unit), 10 times lower than that of the SiO/SiO2 RUM-OMs (2 × 10-3 RIU).",
keywords = "Biosensors, Chemical, Optical cavity, Plasma-enhanced chemical vapor deposition, Rolled-up microtube, Whispering-gallery mode resonance",
author = "Pengfei Song and Cheng Chen and Juntian Qu and Pengfei Ou and Dastjerdi, {M. H.T.} and Hao Fu and Zetian Mi and Jun Song and Xinyu Liu",
note = "Publisher Copyright: Copyright {\textcopyright} (2018) by Chemical and Biological Microsystems Society. All rights reserved.; 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 ; Conference date: 11-11-2018 Through 15-11-2018",
year = "2018",
language = "English",
series = "22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018",
publisher = "Chemical and Biological Microsystems Society",
pages = "969--970",
booktitle = "22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018",
}