Liquid-tolerant electret using super-lyophobic pillar surface

Yu Chung Chen; Ki Young Song; Kenichi Morimoto; Yuji Suzuki

doi:10.1109/MEMSYS.2015.7051152

Liquid-tolerant electret using super-lyophobic pillar surface

Yu Chung Chen, Ki Young Song, Kenichi Morimoto, Yuji Suzuki

Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review

6 Citations (Scopus)

Abstract

For the first time, we have realized electret that can be used in the liquid environment toward better performance of electret-based generators and actuators. By using super-lyophobic overhanging pillar surface, stable Cassie-Baxter (C-B) state is sustained even with low-surface-tension hexadecane liquid and with high surface potential. Pillar surface with a SiO₂ electret layer has been successfully charged with soft X-ray photoionization we previously developed. The pillar surface significantly suppressed the charge decay, and surface potential as high as 160 V has been maintained after 5-day contact with hexadecane droplet.

Original language	English
Title of host publication	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1086-1089
Number of pages	4
Edition	February
ISBN (Electronic)	9781479979554
DOIs	https://doi.org/10.1109/MEMSYS.2015.7051152
Publication status	Published - 26 Feb 2015
Externally published	Yes
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 18 Jan 2015 → 22 Jan 2015

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Number	February
Volume	2015-February
ISSN (Print)	1084-6999

Conference

Conference	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/Territory	Portugal
City	Estoril
Period	18/01/15 → 22/01/15

Access to Document

10.1109/MEMSYS.2015.7051152

Cite this

Chen, Y. C., Song, K. Y., Morimoto, K., & Suzuki, Y. (2015). Liquid-tolerant electret using super-lyophobic pillar surface. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 1086-1089). Article 7051152 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7051152

Chen, Yu Chung ; Song, Ki Young ; Morimoto, Kenichi et al. / Liquid-tolerant electret using super-lyophobic pillar surface. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 1086-1089 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

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title = "Liquid-tolerant electret using super-lyophobic pillar surface",

abstract = "For the first time, we have realized electret that can be used in the liquid environment toward better performance of electret-based generators and actuators. By using super-lyophobic overhanging pillar surface, stable Cassie-Baxter (C-B) state is sustained even with low-surface-tension hexadecane liquid and with high surface potential. Pillar surface with a SiO2 electret layer has been successfully charged with soft X-ray photoionization we previously developed. The pillar surface significantly suppressed the charge decay, and surface potential as high as 160 V has been maintained after 5-day contact with hexadecane droplet.",

author = "Chen, {Yu Chung} and Song, {Ki Young} and Kenichi Morimoto and Yuji Suzuki",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 ; Conference date: 18-01-2015 Through 22-01-2015",

year = "2015",

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doi = "10.1109/MEMSYS.2015.7051152",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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Chen, YC, Song, KY, Morimoto, K & Suzuki, Y 2015, Liquid-tolerant electret using super-lyophobic pillar surface. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7051152, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 1086-1089, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 18/01/15. https://doi.org/10.1109/MEMSYS.2015.7051152

Liquid-tolerant electret using super-lyophobic pillar surface. / Chen, Yu Chung; Song, Ki Young; Morimoto, Kenichi et al.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 1086-1089 7051152 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review

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N2 - For the first time, we have realized electret that can be used in the liquid environment toward better performance of electret-based generators and actuators. By using super-lyophobic overhanging pillar surface, stable Cassie-Baxter (C-B) state is sustained even with low-surface-tension hexadecane liquid and with high surface potential. Pillar surface with a SiO2 electret layer has been successfully charged with soft X-ray photoionization we previously developed. The pillar surface significantly suppressed the charge decay, and surface potential as high as 160 V has been maintained after 5-day contact with hexadecane droplet.

AB - For the first time, we have realized electret that can be used in the liquid environment toward better performance of electret-based generators and actuators. By using super-lyophobic overhanging pillar surface, stable Cassie-Baxter (C-B) state is sustained even with low-surface-tension hexadecane liquid and with high surface potential. Pillar surface with a SiO2 electret layer has been successfully charged with soft X-ray photoionization we previously developed. The pillar surface significantly suppressed the charge decay, and surface potential as high as 160 V has been maintained after 5-day contact with hexadecane droplet.

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M3 - Conference Proceeding

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BT - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015

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Chen YC, Song KY, Morimoto K, Suzuki Y. Liquid-tolerant electret using super-lyophobic pillar surface. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 1086-1089. 7051152. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7051152

Liquid-tolerant electret using super-lyophobic pillar surface

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