Coaxial Dual-wavelength Interferometric Method for a Thermal Infrared Focal-plane-array with Integrated Gratings

Yuanfang Shang; Xiongying Ye; Liangcai Cao; Pengfei Song; Jinyang Feng

doi:10.1038/srep25993

Coaxial Dual-wavelength Interferometric Method for a Thermal Infrared Focal-plane-array with Integrated Gratings

Yuanfang Shang, Xiongying Ye^*, Liangcai Cao, Pengfei Song, Jinyang Feng

^*Corresponding author for this work

Tsinghua University

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Uncooled infrared (IR) focal-plane-array (FPA) with both large sensing range and high sensitivity is a great challenge due to the limited dynamic range of the detected signals. A coaxial dual-wavelength interferometric system was proposed here to detect thermal-induced displacements of an ultrasensitive FPA based on polyvinyl-chloride(PVC)/gold bimorph cantilevers and carbon nanotube (CNT)-based IR absorbing films. By alternately selecting the two displacement measurements performed by λ₁ (=640 nm) and λ₂ (=660 nm), the temperature measuring range with greater than 50% maximum sensitivity can be extended by eight-fold in comparison with the traditional single-wavelength mode. Meanwhile, the relative measurement error over the full measuring range is below 0.4%. In addition, it offers a feasible approach for on-line and on-wafer FPA characterization with great convenience and high efficiency.

Original language	English
Article number	25993
Journal	Scientific Reports
Volume	6
DOIs	https://doi.org/10.1038/srep25993
Publication status	Published - 19 May 2016
Externally published	Yes

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title = "Coaxial Dual-wavelength Interferometric Method for a Thermal Infrared Focal-plane-array with Integrated Gratings",

abstract = "Uncooled infrared (IR) focal-plane-array (FPA) with both large sensing range and high sensitivity is a great challenge due to the limited dynamic range of the detected signals. A coaxial dual-wavelength interferometric system was proposed here to detect thermal-induced displacements of an ultrasensitive FPA based on polyvinyl-chloride(PVC)/gold bimorph cantilevers and carbon nanotube (CNT)-based IR absorbing films. By alternately selecting the two displacement measurements performed by λ1 (=640 nm) and λ2 (=660 nm), the temperature measuring range with greater than 50% maximum sensitivity can be extended by eight-fold in comparison with the traditional single-wavelength mode. Meanwhile, the relative measurement error over the full measuring range is below 0.4%. In addition, it offers a feasible approach for on-line and on-wafer FPA characterization with great convenience and high efficiency.",

author = "Yuanfang Shang and Xiongying Ye and Liangcai Cao and Pengfei Song and Jinyang Feng",

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T1 - Coaxial Dual-wavelength Interferometric Method for a Thermal Infrared Focal-plane-array with Integrated Gratings

AU - Shang, Yuanfang

AU - Ye, Xiongying

AU - Cao, Liangcai

AU - Song, Pengfei

AU - Feng, Jinyang

PY - 2016/5/19

Y1 - 2016/5/19

N2 - Uncooled infrared (IR) focal-plane-array (FPA) with both large sensing range and high sensitivity is a great challenge due to the limited dynamic range of the detected signals. A coaxial dual-wavelength interferometric system was proposed here to detect thermal-induced displacements of an ultrasensitive FPA based on polyvinyl-chloride(PVC)/gold bimorph cantilevers and carbon nanotube (CNT)-based IR absorbing films. By alternately selecting the two displacement measurements performed by λ1 (=640 nm) and λ2 (=660 nm), the temperature measuring range with greater than 50% maximum sensitivity can be extended by eight-fold in comparison with the traditional single-wavelength mode. Meanwhile, the relative measurement error over the full measuring range is below 0.4%. In addition, it offers a feasible approach for on-line and on-wafer FPA characterization with great convenience and high efficiency.

AB - Uncooled infrared (IR) focal-plane-array (FPA) with both large sensing range and high sensitivity is a great challenge due to the limited dynamic range of the detected signals. A coaxial dual-wavelength interferometric system was proposed here to detect thermal-induced displacements of an ultrasensitive FPA based on polyvinyl-chloride(PVC)/gold bimorph cantilevers and carbon nanotube (CNT)-based IR absorbing films. By alternately selecting the two displacement measurements performed by λ1 (=640 nm) and λ2 (=660 nm), the temperature measuring range with greater than 50% maximum sensitivity can be extended by eight-fold in comparison with the traditional single-wavelength mode. Meanwhile, the relative measurement error over the full measuring range is below 0.4%. In addition, it offers a feasible approach for on-line and on-wafer FPA characterization with great convenience and high efficiency.

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Coaxial Dual-wavelength Interferometric Method for a Thermal Infrared Focal-plane-array with Integrated Gratings

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