Transfer Learning-Based Artificial Intelligence-Integrated Physical Modeling to Enable Failure Analysis for 3 Nanometer and Smaller Silicon-Based CMOS Transistors

Jieming Pan^*, Kain Lu Low, Joydeep Ghosh, Senthilnath Jayavelu, Md Meftahul Ferdaus, Shang Yi Lim, Evgeny Zamburg, Yida Li, Baoshan Tang, Xinghua Wang, Jin Feng Leong, Savitha Ramasamy, Tonio Buonassisi, Chen Khong Tham, Aaron Voon Yew Thean^*