Temperature-Dependence of Aluminum Implanted 4H-SiC after High-Temperature Annealing

Fanzhengshu Wu, Hongping Ma, Jie Zhang, Xinlan Hou, Yuanlan Zhang, Qingchun Zhang*

*Corresponding author for this work

Research output: Chapter in Book or Report/Conference proceedingConference Proceedingpeer-review

1 Citation (Scopus)

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Chemistry

Material Science