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Rolled-up SiOx/SiNx microtubes made by PECVD for sensitive solvent detection
Pengfei Song, Cheng Chen, Juntian Qu, Pengfei Ou, M. H.T. Dastjerdi, Hao Fu, Zetian Mi, Jun Song, Xinyu Liu*
*Corresponding author for this work
Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review