Review of MEMS flow sensors based on artificial hair cell sensor

An artificial hair cell sensor is the current technology based on a biological inspiration and is widely used in underwater applications including the glider, robotic and autonomous surface vehicle. These papers discuss a few strategies in relation to the principles of sensing, fabrication, performance, and preliminary measurement data. The MEMS flow sensor is generally needed to replace existing commercial sensors that are inadequate for some applications. Material also provides some advantages to the hair cell sensor. Some materials such as Polydimethylsilaxone and Polyurethane have been investigated. The sensing element is reviewed including the doped piezoresistors, strain gauge and force sensitive resistors. Performance and result of each design will be presented briefly. Finally, the importance and the need for modeling, simulation and experiments will be reviewed based on the latest achievements on that particular research area.