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Insights into the effects of Al-ion implantation temperature on material properties of 4H-SiC
Fanzhengshu Wu, Jie Zhang, Wei Xi, Yan Qing Chi, Qi Bin Liu, Lei Yang, Hong Ping Ma*, Qing Chun Zhang
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
6
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(Scopus)