Insights into the effects of Al-ion implantation temperature on material properties of 4H-SiC

Fanzhengshu Wu, Jie Zhang, Wei Xi, Yan Qing Chi, Qi Bin Liu, Lei Yang, Hong Ping Ma*, Qing Chun Zhang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

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Material Science