Good repeatability of AlGaN/GaN HEMT on 4″ Si substrate by 5×4″ multi-wafer production MOCVD system

Panfeng Ji, Yuxia Feng, Jianpeng Cheng, Jie Zhang, Chunyan Song, Xuelin Yang, Bo Shen

Research output: Contribution to conferencePaperpeer-review

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Chemical Engineering

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