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Error factors affecting the result of Laser Interference Lithography
Jin Zhang*, Shilei Jiang, Chunlei Tan, Zuobin Wang, Dayou Li, Yong Yue, Renxi Qiu, Guobin Sun, Lihong Yang, Sanlong Wang
*Corresponding author for this work
Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review