Atomic-Level Sn Doping Effect in Ga2O3 Films Using Plasma-Enhanced Atomic Layer Deposition

Yi Shen, Hong Ping Ma*, Lin Gu, Jie Zhang, Wei Huang, Jing Tao Zhu, Qing Chun Zhang*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

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