AgTaO3 and AgNbO3 thin films by pulsed laser deposition

Jang Yong Kim*, Alexander M. Grishin

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

Silver tantalate AgTaO3 (ATO) and silver niobate AgNbO3 (ANO) films have been grown on to the LaAlO3 (001) and sapphire Al2O3 (0112, r-cut) single crystals by pulsed laser deposition technique from stoichiometric ATO and ANO targets. X-ray diffraction study revealed epitaxial quality of ATO and ANO films on the LaAlO3 (001) whereas on the sapphire r-cut substrate they are preferential (110) and (001) oriented. To characterize microwave films properties in the range from 1 to 40 GHz, coplanar line interdigital capacitors were fabricated by photolithography and lift-off technique. ANO film capacitors show superior properties: frequency dispersion was as low as 13%, voltage tunability (40 V, 200 kV/cm) was about 4.6% at 20 GHz, loss tangent ∼0.106 at 20 GHz, K-factor = tunability / tanδ from 49% @ 10 GHz to 33% at 40 GHz.

Original languageEnglish
Pages (from-to)615-618
Number of pages4
JournalThin Solid Films
Volume515
Issue number2 SPEC. ISS.
DOIs
Publication statusPublished - 25 Oct 2006
Externally publishedYes

Keywords

  • Coplanar waveguides
  • Epitaxial silver tantalate niobate films
  • Ferroelectric ceramics
  • Pulsed laser deposition
  • Scattering parameters measurement
  • Voltage tunable microwave devices

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