Abstract
LiNbO3 has been widely researched and applied as nonlinear materials for several decades. To integrate LiNbO3 and Si into one chip can offer a new tool to manipulate the optic-electrics characteristics. In this paper, the influence of temperature on the crystal orientation of LiNbO3 thin films on Si (111) substrate is discovered by Dissipative Particle Dynamics method (DPD for short), and the thin films crystal orientation is statistic-ed with the mathematical method. The optimum growth condition of c-axis surface is well agreed with the experiment results.
Original language | English |
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Pages (from-to) | 190-195 |
Number of pages | 6 |
Journal | Ferroelectrics |
Volume | 550 |
Issue number | 1 |
DOIs | |
Publication status | Published - 3 Oct 2019 |
Externally published | Yes |
Keywords
- crystal orientation
- LiNbO
- Silicon
- thin films