TY - JOUR
T1 - Vibratory response of diamond-like amorphous carbon cantilevers under different temperatures
AU - Chua, Daniel H.C.
AU - Tay, B. K.
AU - Zhang, P.
AU - Teo, E. H.T.
AU - Lim, L. T.W.
AU - O'Shea, S.
AU - Miao, J.
AU - Milne, W. I.
N1 - Funding Information:
This project is partially funded via the CMI initiative through project 059/P-MEMS. The authors (D.H.C. Chua and W.I. Milne) would like to acknowledge partial funding by the EPSRC carbon-based Electronic (CBE) program. The authors shall like to thank Mr. K.S. Tang for help with the clean-room process.
PY - 2004/11
Y1 - 2004/11
N2 - Diamond-like amorphous carbon films were deposited using filtered cathodic vacuum arc (FCVA) with the plasma ion immersion implantation (PIII) system. A unique multilayer film, comprising of alternating high-sp3 content (90%), high-stress (9 GPa) films, low-sp3 content (50%), and low-stress films (<0.5 GPa), was fabricated. By alternating these layers, a 1.5-μm-thick film was subsequently deposited. Free-standing microcantilevers measuring 150×50 μm had been subsequently fabricated by using standard lithography and wet etching. The resonance frequency of the microcantilevers was measured by a vacuum laser vibrometer system to be 109.5 kHz. After gradual heating to 240°C, the resonance frequency was observed to increase to a high of 111.5 kHz.
AB - Diamond-like amorphous carbon films were deposited using filtered cathodic vacuum arc (FCVA) with the plasma ion immersion implantation (PIII) system. A unique multilayer film, comprising of alternating high-sp3 content (90%), high-stress (9 GPa) films, low-sp3 content (50%), and low-stress films (<0.5 GPa), was fabricated. By alternating these layers, a 1.5-μm-thick film was subsequently deposited. Free-standing microcantilevers measuring 150×50 μm had been subsequently fabricated by using standard lithography and wet etching. The resonance frequency of the microcantilevers was measured by a vacuum laser vibrometer system to be 109.5 kHz. After gradual heating to 240°C, the resonance frequency was observed to increase to a high of 111.5 kHz.
KW - Annealing
KW - DLC microcantilevers
KW - Diamond-like amorphous carbon
KW - Intrinsic stress
KW - Microcantilevers
KW - Resonance frequency
UR - http://www.scopus.com/inward/record.url?scp=7544241301&partnerID=8YFLogxK
U2 - 10.1016/j.diamond.2004.08.002
DO - 10.1016/j.diamond.2004.08.002
M3 - Conference article
AN - SCOPUS:7544241301
SN - 0925-9635
VL - 13
SP - 1980
EP - 1983
JO - Diamond and Related Materials
JF - Diamond and Related Materials
IS - 11-12
T2 - Proceedings of the 9th International Conference on New Diamond
Y2 - 26 March 2004 through 29 March 2004
ER -