TY - JOUR
T1 - Versailles Project on Advanced Materials and Standards interlaboratory study on intensity calibration for x-ray photoelectron spectroscopy instruments using low-density polyethylene
AU - Reed, Benjamen P.
AU - Cant, David J.H.
AU - Spencer, Steve J.
AU - Carmona-Carmona, Abraham Jorge
AU - Bushell, Adam
AU - Herrera-Gómez, Alberto
AU - Kurokawa, Akira
AU - Thissen, Andreas
AU - Thomas, Andrew G.
AU - Britton, Andrew J.
AU - Bernasik, Andrzej
AU - Fuchs, Anne
AU - Baddorf, Arthur P.
AU - Bock, Bernd
AU - Theilacker, Bill
AU - Cheng, Bin
AU - Castner, David G.
AU - Morgan, David J.
AU - Valley, David
AU - Willneff, Elizabeth A.
AU - Smith, Emily F.
AU - Nolot, Emmanuel
AU - Xie, Fangyan
AU - Zorn, Gilad
AU - Smith, Graham C.
AU - Yasufuku, Hideyuki
AU - Fenton, Jeffery L.
AU - Chen, Jian
AU - Counsell, Jonathan D.P.
AU - Radnik, Jörg
AU - Gaskell, Karen J.
AU - Artyushkova, Kateryna
AU - Yang, Li
AU - Zhang, Lulu
AU - Eguchi, Makiho
AU - Walker, Marc
AU - Hajdyła, Mariusz
AU - Marzec, Mateusz M.
AU - Linford, Matthew R.
AU - Kubota, Naoyoshi
AU - Cortazar-Martínez, Orlando
AU - Dietrich, Paul
AU - Satoh, Riki
AU - Schroeder, Sven L.M.
AU - Avval, Tahereh G.
AU - Nagatomi, Takaharu
AU - Fernandez, Vincent
AU - Lake, Wayne
AU - Azuma, Yasushi
AU - Yoshikawa, Yusuke
AU - Shard, Alexander G.
N1 - Publisher Copyright:
© 2020 Author(s).
PY - 2020/12/1
Y1 - 2020/12/1
N2 - We report the results of a Versailles Project on Advanced Materials and Standards interlaboratory study on the intensity scale calibration of x-ray photoelectron spectrometers using low-density polyethylene (LDPE) as an alternative material to gold, silver, and copper. An improved set of LDPE reference spectra, corrected for different instrument geometries using a quartz-monochromated Al Kα x-ray source, was developed using data provided by participants in this study. Using these new reference spectra, a transmission function was calculated for each dataset that participants provided. When compared to a similar calibration procedure using the NPL reference spectra for gold, the LDPE intensity calibration method achieves an absolute offset of ∼3.0% and a systematic deviation of ±6.5% on average across all participants. For spectra recorded at high pass energies (≥90 eV), values of absolute offset and systematic deviation are ∼5.8% and ±5.7%, respectively, whereas for spectra collected at lower pass energies (<90 eV), values of absolute offset and systematic deviation are ∼4.9% and ±8.8%, respectively; low pass energy spectra perform worse than the global average, in terms of systematic deviations, due to diminished count rates and signal-to-noise ratio. Differences in absolute offset are attributed to the surface roughness of the LDPE induced by sample preparation. We further assess the usability of LDPE as a secondary reference material and comment on its performance in the presence of issues such as variable dark noise, x-ray warm up times, inaccuracy at low count rates, and underlying spectrometer problems. In response to participant feedback and the results of the study, we provide an updated LDPE intensity calibration protocol to address the issues highlighted in the interlaboratory study. We also comment on the lack of implementation of a consistent and traceable intensity calibration method across the community of x-ray photoelectron spectroscopy (XPS) users and, therefore, propose a route to achieving this with the assistance of instrument manufacturers, metrology laboratories, and experts leading to an international standard for XPS intensity scale calibration.
AB - We report the results of a Versailles Project on Advanced Materials and Standards interlaboratory study on the intensity scale calibration of x-ray photoelectron spectrometers using low-density polyethylene (LDPE) as an alternative material to gold, silver, and copper. An improved set of LDPE reference spectra, corrected for different instrument geometries using a quartz-monochromated Al Kα x-ray source, was developed using data provided by participants in this study. Using these new reference spectra, a transmission function was calculated for each dataset that participants provided. When compared to a similar calibration procedure using the NPL reference spectra for gold, the LDPE intensity calibration method achieves an absolute offset of ∼3.0% and a systematic deviation of ±6.5% on average across all participants. For spectra recorded at high pass energies (≥90 eV), values of absolute offset and systematic deviation are ∼5.8% and ±5.7%, respectively, whereas for spectra collected at lower pass energies (<90 eV), values of absolute offset and systematic deviation are ∼4.9% and ±8.8%, respectively; low pass energy spectra perform worse than the global average, in terms of systematic deviations, due to diminished count rates and signal-to-noise ratio. Differences in absolute offset are attributed to the surface roughness of the LDPE induced by sample preparation. We further assess the usability of LDPE as a secondary reference material and comment on its performance in the presence of issues such as variable dark noise, x-ray warm up times, inaccuracy at low count rates, and underlying spectrometer problems. In response to participant feedback and the results of the study, we provide an updated LDPE intensity calibration protocol to address the issues highlighted in the interlaboratory study. We also comment on the lack of implementation of a consistent and traceable intensity calibration method across the community of x-ray photoelectron spectroscopy (XPS) users and, therefore, propose a route to achieving this with the assistance of instrument manufacturers, metrology laboratories, and experts leading to an international standard for XPS intensity scale calibration.
UR - http://www.scopus.com/inward/record.url?scp=85096723336&partnerID=8YFLogxK
U2 - 10.1116/6.0000577
DO - 10.1116/6.0000577
M3 - Article
AN - SCOPUS:85096723336
SN - 0734-2101
VL - 38
JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
IS - 6
M1 - 577
ER -