Resistive Switching Performance of RRAM Device with Stacked Solution-based Dielectric Layers

Zongjie Shen, Chun Zhao, Ivona Z. Mitrovic, Cezhou Zhao, Li Yang

Research output: Chapter in Book or Report/Conference proceedingConference Proceedingpeer-review

Abstract

In this work, transparent Ag/GaOx/AlOx/ITO RRAM devices were fabricated with solution-based bilayer dielectric annealed at low temperature (250°C). All devices exhibited superior electrical performance such as low operation voltage in the SET process (0.3 V), narrow resistance distribution, high ON/OFF ratio (-104), long retention time (>104 s) and good endurance property (>100 cycles). The performance of bilayer-dielectric RRAM devices suggested the great potential of application in the flexible electronics industry.

Original languageEnglish
Title of host publication2020 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, EUROSOI-ULIS 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728187655
DOIs
Publication statusPublished - 1 Sept 2020
Event2020 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, EUROSOI-ULIS 2020 - Caen, France
Duration: 1 Sept 202030 Sept 2020

Publication series

Name2020 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, EUROSOI-ULIS 2020

Conference

Conference2020 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, EUROSOI-ULIS 2020
Country/TerritoryFrance
CityCaen
Period1/09/2030/09/20

Keywords

  • bilayer dielectric
  • low annealing temperature
  • solution-based
  • transparent

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