Niobate-tantalate thin films microwave varactors

Jang Yong Kim; Alexander M. Grishin

doi:10.1016/j.tsf.2005.12.212

Niobate-tantalate thin films microwave varactors

Jang Yong Kim^*, Alexander M. Grishin

^*Corresponding author for this work

KTH Royal Institute of Technology

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

We present comparative characteristics of microwave variable capacitors (varactors) fabricated on Na_0.5K_0.5NbO₃ (NKN), AgTa_0.5Nb_0.5O₃ (ATN) and Ba_0.5Sr_0.5TiO₃ (BST) ferroelectric films sintered by pulsed laser deposition technique. Two port 2 μm finger gap coplanar waveguide interdigital capacitive (CPWIDC) structures were defined on ferroelectric films surface by a standard lift off technique. Results of the microwave on-wafer tests performed in frequency range 1 to 40 GHz have been examined with a de-embedding technique to extract device characteristics from the measured S-parameters. The frequency dispersion of capacitance was 37%, 4.3%, and 17%; the voltage tunability (200 kV/cm) 22%, 4.7%, and 22% at 20 GHz; loss tangent ∼0.23, 0.068, and 0.137 at 20 GHz for NKN/Nd:YAlO₃, ATN/Al₂O₃, and BST/Al₂O₃ films capacitors.

Original language	English
Pages (from-to)	619-622
Number of pages	4
Journal	Thin Solid Films
Volume	515
Issue number	2 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.tsf.2005.12.212
Publication status	Published - 25 Oct 2006
Externally published	Yes

Keywords

Barium strontium titanate
Coplanar waveguides
Epitaxial films
Ferroelectric ceramics
Pottasium sodium niobate
Pulsed laser deposition
Scattering parameters measurement
Silver tantalate niobate
Voltage tunable microwave devices

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10.1016/j.tsf.2005.12.212

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title = "Niobate-tantalate thin films microwave varactors",

abstract = "We present comparative characteristics of microwave variable capacitors (varactors) fabricated on Na0.5K0.5NbO3 (NKN), AgTa0.5Nb0.5O3 (ATN) and Ba0.5Sr0.5TiO3 (BST) ferroelectric films sintered by pulsed laser deposition technique. Two port 2 μm finger gap coplanar waveguide interdigital capacitive (CPWIDC) structures were defined on ferroelectric films surface by a standard lift off technique. Results of the microwave on-wafer tests performed in frequency range 1 to 40 GHz have been examined with a de-embedding technique to extract device characteristics from the measured S-parameters. The frequency dispersion of capacitance was 37%, 4.3%, and 17%; the voltage tunability (200 kV/cm) 22%, 4.7%, and 22% at 20 GHz; loss tangent ∼0.23, 0.068, and 0.137 at 20 GHz for NKN/Nd:YAlO3, ATN/Al2O3, and BST/Al2O3 films capacitors.",

keywords = "Barium strontium titanate, Coplanar waveguides, Epitaxial films, Ferroelectric ceramics, Pottasium sodium niobate, Pulsed laser deposition, Scattering parameters measurement, Silver tantalate niobate, Voltage tunable microwave devices",

author = "Kim, {Jang Yong} and Grishin, {Alexander M.}",

year = "2006",

month = oct,

day = "25",

doi = "10.1016/j.tsf.2005.12.212",

language = "English",

volume = "515",

pages = "619--622",

journal = "Thin Solid Films",

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TY - JOUR

T1 - Niobate-tantalate thin films microwave varactors

AU - Kim, Jang Yong

AU - Grishin, Alexander M.

PY - 2006/10/25

Y1 - 2006/10/25

N2 - We present comparative characteristics of microwave variable capacitors (varactors) fabricated on Na0.5K0.5NbO3 (NKN), AgTa0.5Nb0.5O3 (ATN) and Ba0.5Sr0.5TiO3 (BST) ferroelectric films sintered by pulsed laser deposition technique. Two port 2 μm finger gap coplanar waveguide interdigital capacitive (CPWIDC) structures were defined on ferroelectric films surface by a standard lift off technique. Results of the microwave on-wafer tests performed in frequency range 1 to 40 GHz have been examined with a de-embedding technique to extract device characteristics from the measured S-parameters. The frequency dispersion of capacitance was 37%, 4.3%, and 17%; the voltage tunability (200 kV/cm) 22%, 4.7%, and 22% at 20 GHz; loss tangent ∼0.23, 0.068, and 0.137 at 20 GHz for NKN/Nd:YAlO3, ATN/Al2O3, and BST/Al2O3 films capacitors.

AB - We present comparative characteristics of microwave variable capacitors (varactors) fabricated on Na0.5K0.5NbO3 (NKN), AgTa0.5Nb0.5O3 (ATN) and Ba0.5Sr0.5TiO3 (BST) ferroelectric films sintered by pulsed laser deposition technique. Two port 2 μm finger gap coplanar waveguide interdigital capacitive (CPWIDC) structures were defined on ferroelectric films surface by a standard lift off technique. Results of the microwave on-wafer tests performed in frequency range 1 to 40 GHz have been examined with a de-embedding technique to extract device characteristics from the measured S-parameters. The frequency dispersion of capacitance was 37%, 4.3%, and 17%; the voltage tunability (200 kV/cm) 22%, 4.7%, and 22% at 20 GHz; loss tangent ∼0.23, 0.068, and 0.137 at 20 GHz for NKN/Nd:YAlO3, ATN/Al2O3, and BST/Al2O3 films capacitors.

KW - Barium strontium titanate

KW - Coplanar waveguides

KW - Epitaxial films

KW - Ferroelectric ceramics

KW - Pottasium sodium niobate

KW - Pulsed laser deposition

KW - Scattering parameters measurement

KW - Silver tantalate niobate

KW - Voltage tunable microwave devices

UR - http://www.scopus.com/inward/record.url?scp=33748755445&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2005.12.212

DO - 10.1016/j.tsf.2005.12.212

M3 - Article

AN - SCOPUS:33748755445

SN - 0040-6090

VL - 515

SP - 619

EP - 622

JO - Thin Solid Films

JF - Thin Solid Films

IS - 2 SPEC. ISS.

ER -

Niobate-tantalate thin films microwave varactors

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Keywords

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