Nearly Reversible Threshold Voltage Shifts with Low-Voltage Bias Stress in Solution-Processed In2O3 Thin-Film Transistors

Tao Song, Tianshi Zhao, Yuxiao Fang, Chun Zhao, Cezhou Zhao*, Sang Lam

*Corresponding author for this work

Research output: Chapter in Book or Report/Conference proceedingConference Proceedingpeer-review

2 Citations (Scopus)

Abstract

N-channel thin-film transistors (TFTs) made of solution-processed In2O3 were fabricated and electrical tested for device reliability. While the TFTs give a threshold voltage Vth of 0.6 V for low-voltage operation, experimental results show that Vth shifts over time even when the gate biasing voltage is at 3 V. Vth can increase to about 2 V after about one hour. The change in Vth is nearly reversible if there is a long enough relaxation time. When the gate biasing voltage is -3 V, Vth changes from 0.6 V to -0.6 V and the Vth shift is less reversible. Such phenomena are expected to be due to the interface traps in the solution-processed In2O3.

Original languageEnglish
Title of host publication2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages333-335
Number of pages3
ISBN (Electronic)9781538665084
DOIs
Publication statusPublished - Mar 2019
Event2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019 - Singapore, Singapore
Duration: 12 Mar 201915 Mar 2019

Publication series

Name2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019

Conference

Conference2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
Country/TerritorySingapore
CitySingapore
Period12/03/1915/03/19

Keywords

  • bias stress effect
  • indium-oxide TFT
  • solution-processed InO TFT
  • threshold voltage shift

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