Modification of silicon surface by direct laser interference

Dapeng Wang; Zuobin Wang; Ziang Zhang; Yong Yue; Dayou Li; Carsten Maple

doi:10.1109/3M-NANO.2012.6473000

Modification of silicon surface by direct laser interference

Dapeng Wang^*, Zuobin Wang, Ziang Zhang, Yong Yue, Dayou Li, Carsten Maple

^*Corresponding author for this work

Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review

2 Citations (Scopus)

Abstract

Periodic and quasi-periodic structures on silicon surface have numerous significant applications in photoelectronics and surface engineering. A number of technologies have been developed to fabricate these structures in various research areas. In this work, we take the strategy of direct nanosecond laser interference patterning technology. Well-defined grating and dot structures have been achieved and interactive thermal effect was observed obviously. Additionally, the height and width of different structures were analyzed by AFM. It can be demonstrated that direct laser interference lithography is a promising technology which has the capability for the manufacturing of micro and nano structures.

Original language	English
Title of host publication	2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings
Pages	5-8
Number of pages	4
DOIs	https://doi.org/10.1109/3M-NANO.2012.6473000
Publication status	Published - 2012
Externally published	Yes
Event	2012 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Xi'an, China Duration: 29 Aug 2012 → 1 Sept 2012

Publication series

Name	2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings

Conference

Conference	2012 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012
Country/Territory	China
City	Xi'an
Period	29/08/12 → 1/09/12

Keywords

Direct laser interference patterning
micro and nano structures
thermal effect

Access to Document

10.1109/3M-NANO.2012.6473000

Cite this

Wang, D., Wang, Z., Zhang, Z., Yue, Y., Li, D., & Maple, C. (2012). Modification of silicon surface by direct laser interference. In 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings (pp. 5-8). Article 6473000 (2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings). https://doi.org/10.1109/3M-NANO.2012.6473000

Wang, Dapeng ; Wang, Zuobin ; Zhang, Ziang et al. / Modification of silicon surface by direct laser interference. 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings. 2012. pp. 5-8 (2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings).

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title = "Modification of silicon surface by direct laser interference",

abstract = "Periodic and quasi-periodic structures on silicon surface have numerous significant applications in photoelectronics and surface engineering. A number of technologies have been developed to fabricate these structures in various research areas. In this work, we take the strategy of direct nanosecond laser interference patterning technology. Well-defined grating and dot structures have been achieved and interactive thermal effect was observed obviously. Additionally, the height and width of different structures were analyzed by AFM. It can be demonstrated that direct laser interference lithography is a promising technology which has the capability for the manufacturing of micro and nano structures.",

keywords = "Direct laser interference patterning, micro and nano structures, thermal effect",

author = "Dapeng Wang and Zuobin Wang and Ziang Zhang and Yong Yue and Dayou Li and Carsten Maple",

year = "2012",

doi = "10.1109/3M-NANO.2012.6473000",

language = "English",

isbn = "9781467345897",

series = "2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings",

pages = "5--8",

booktitle = "2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings",

note = "2012 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 ; Conference date: 29-08-2012 Through 01-09-2012",

}

Wang, D, Wang, Z, Zhang, Z, Yue, Y, Li, D & Maple, C 2012, Modification of silicon surface by direct laser interference. in 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings., 6473000, 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings, pp. 5-8, 2012 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012, Xi'an, China, 29/08/12. https://doi.org/10.1109/3M-NANO.2012.6473000

Modification of silicon surface by direct laser interference. / Wang, Dapeng; Wang, Zuobin; Zhang, Ziang et al.
2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings. 2012. p. 5-8 6473000 (2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings).

Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review

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T1 - Modification of silicon surface by direct laser interference

AU - Wang, Dapeng

AU - Wang, Zuobin

AU - Zhang, Ziang

AU - Yue, Yong

AU - Li, Dayou

AU - Maple, Carsten

PY - 2012

Y1 - 2012

N2 - Periodic and quasi-periodic structures on silicon surface have numerous significant applications in photoelectronics and surface engineering. A number of technologies have been developed to fabricate these structures in various research areas. In this work, we take the strategy of direct nanosecond laser interference patterning technology. Well-defined grating and dot structures have been achieved and interactive thermal effect was observed obviously. Additionally, the height and width of different structures were analyzed by AFM. It can be demonstrated that direct laser interference lithography is a promising technology which has the capability for the manufacturing of micro and nano structures.

AB - Periodic and quasi-periodic structures on silicon surface have numerous significant applications in photoelectronics and surface engineering. A number of technologies have been developed to fabricate these structures in various research areas. In this work, we take the strategy of direct nanosecond laser interference patterning technology. Well-defined grating and dot structures have been achieved and interactive thermal effect was observed obviously. Additionally, the height and width of different structures were analyzed by AFM. It can be demonstrated that direct laser interference lithography is a promising technology which has the capability for the manufacturing of micro and nano structures.

KW - Direct laser interference patterning

KW - micro and nano structures

KW - thermal effect

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T3 - 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings

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Wang D, Wang Z, Zhang Z, Yue Y, Li D, Maple C. Modification of silicon surface by direct laser interference. In 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings. 2012. p. 5-8. 6473000. (2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings). doi: 10.1109/3M-NANO.2012.6473000

Modification of silicon surface by direct laser interference

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