Microstructure and mechanical properties of nanocomposite amorphous carbon films

P. Zhang; B. K. Tay; C. Q. Sun; S. P. Lau

doi:10.1116/1.1486227

Microstructure and mechanical properties of nanocomposite amorphous carbon films

P. Zhang, B. K. Tay^*, C. Q. Sun, S. P. Lau

^*Corresponding author for this work

Nanyang Technological University

Research output: Contribution to journal › Article › peer-review

51 Citations (Scopus)

Abstract

Nanocomposite amorphous carbon films were prepared by the filtered cathodic vacuum arc (FCVA) technique. Incorporating up to 10 at.% of a metal element into a graphitic target resulted in the presence of a carbide phase in a-C:Si and a-C:Ti films but not in a-C:Al films. Incorporating metal into amorphous carbon films significantly reduced compressive stress but maintained the relatively high hardness and Young's modulus.

Original language	English
Pages (from-to)	1390-1394
Number of pages	5
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	20
Issue number	4
DOIs	https://doi.org/10.1116/1.1486227
Publication status	Published - Jul 2002
Externally published	Yes

Access to Document

10.1116/1.1486227

Cite this

@article{20a6c30f5513409c9ea84e3400f58f9a,

title = "Microstructure and mechanical properties of nanocomposite amorphous carbon films",

abstract = "Nanocomposite amorphous carbon films were prepared by the filtered cathodic vacuum arc (FCVA) technique. Incorporating up to 10 at.% of a metal element into a graphitic target resulted in the presence of a carbide phase in a-C:Si and a-C:Ti films but not in a-C:Al films. Incorporating metal into amorphous carbon films significantly reduced compressive stress but maintained the relatively high hardness and Young's modulus.",

author = "P. Zhang and Tay, {B. K.} and Sun, {C. Q.} and Lau, {S. P.}",

year = "2002",

month = jul,

doi = "10.1116/1.1486227",

language = "English",

volume = "20",

pages = "1390--1394",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

number = "4",

}

TY - JOUR

T1 - Microstructure and mechanical properties of nanocomposite amorphous carbon films

AU - Zhang, P.

AU - Tay, B. K.

AU - Sun, C. Q.

AU - Lau, S. P.

PY - 2002/7

Y1 - 2002/7

N2 - Nanocomposite amorphous carbon films were prepared by the filtered cathodic vacuum arc (FCVA) technique. Incorporating up to 10 at.% of a metal element into a graphitic target resulted in the presence of a carbide phase in a-C:Si and a-C:Ti films but not in a-C:Al films. Incorporating metal into amorphous carbon films significantly reduced compressive stress but maintained the relatively high hardness and Young's modulus.

AB - Nanocomposite amorphous carbon films were prepared by the filtered cathodic vacuum arc (FCVA) technique. Incorporating up to 10 at.% of a metal element into a graphitic target resulted in the presence of a carbide phase in a-C:Si and a-C:Ti films but not in a-C:Al films. Incorporating metal into amorphous carbon films significantly reduced compressive stress but maintained the relatively high hardness and Young's modulus.

UR - http://www.scopus.com/inward/record.url?scp=0036648891&partnerID=8YFLogxK

U2 - 10.1116/1.1486227

DO - 10.1116/1.1486227

M3 - Article

AN - SCOPUS:0036648891

SN - 0734-2101

VL - 20

SP - 1390

EP - 1394

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4

ER -

Microstructure and mechanical properties of nanocomposite amorphous carbon films

Abstract

Access to Document

Other files and links

Cite this