TY - GEN
T1 - Laser interference nanolithography with a 405nm fiber semiconductor laser
AU - Xu, Jia
AU - Wang, Zuobin
AU - Weng, Zhankun
AU - Li, Zhiming
AU - Sun, Xiaojuan
AU - Liu, Lanjiao
AU - Zhao, Le
AU - Yue, Yong
AU - Zhang, Jin
PY - 2013
Y1 - 2013
N2 - This paper presents a method of laser interference nanolithography for the formation of interference patterns on the resist using a fiber semiconductor laser with a wavelength of 405nm. In the method, surface pattern structures are fabricated through the control of the incident angles of two interfering beams, the exposure dose of laser radiation and the development time. The angle adjustment becomes more convenient and the influence of environmental variations on the system has been reduced due to the use of fiber optic components. In the work, a feature size of down to 63nm and a pattern period of 215nm were achieved. The experimental results have shown that the method can be used for low cost micro and nano fabrication of periodical surface patterns with the features of low cost, simplicity and flexibility.
AB - This paper presents a method of laser interference nanolithography for the formation of interference patterns on the resist using a fiber semiconductor laser with a wavelength of 405nm. In the method, surface pattern structures are fabricated through the control of the incident angles of two interfering beams, the exposure dose of laser radiation and the development time. The angle adjustment becomes more convenient and the influence of environmental variations on the system has been reduced due to the use of fiber optic components. In the work, a feature size of down to 63nm and a pattern period of 215nm were achieved. The experimental results have shown that the method can be used for low cost micro and nano fabrication of periodical surface patterns with the features of low cost, simplicity and flexibility.
KW - Fiber semiconductor laser
KW - Laser interference nanolithography
KW - Nano fabrication
UR - http://www.scopus.com/inward/record.url?scp=84880405709&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/KEM.552.262
DO - 10.4028/www.scientific.net/KEM.552.262
M3 - Conference Proceeding
AN - SCOPUS:84880405709
SN - 9783037856918
T3 - Key Engineering Materials
SP - 262
EP - 267
BT - Advances in Optics Manufacture
PB - Trans Tech Publications Ltd
T2 - Asia Pacific Conference on Optics Manufacture 2012, APCOM 2012
Y2 - 26 August 2012 through 28 August 2012
ER -