Abstract
The substrates with regular patterns of self-assembly monolayers (SAMs) produced by microcontact printing with octadecyltrichlorosilane (OTS) was employed to direct thin polystyrene dewetting to fabricate ordered micrometer scale pattern. The pattern sizes and pattern fashion can be manipulated by controlling the experimental parameters. The pattern formation mechanisms have been discussed. The dewetting pattern can be transferred to form PDMS stamp for future microfabrication process.
Original language | English |
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Pages (from-to) | 129-136 |
Number of pages | 8 |
Journal | Surface Science |
Volume | 539 |
Issue number | 1-3 |
DOIs | |
Publication status | Published - 1 Aug 2003 |
Externally published | Yes |
Keywords
- Atomic force microscopy
- Self-assembly
- Wetting