Fabrication techniques for PDMS dome-shaped membrane using soft lithography process

Mohd Norzaidi Mat Nawi; Asrulnizam Abd Manaf; Mohd Rizal Arshad; Othman Sidek

doi:10.4028/www.scientific.net/AMM.660.899

Fabrication techniques for PDMS dome-shaped membrane using soft lithography process

Mohd Norzaidi Mat Nawi^*, Asrulnizam Abd Manaf, Mohd Rizal Arshad, Othman Sidek

^*Corresponding author for this work

Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review

Abstract

The dome-shaped membrane is very important part of the micro/nano devices. The dome-shaped with the thickness of 150 μm and a radius of 3.2 mm was fabricated using the soft lithography process. The Polydimethylsiloxane (PDMS) was selected as a material because it deformable and suitable to implement as a membrane. Soft lithography is based on pattern transfer using a mold that is patterning the substrate material. In this paper, two techniques were suggested to fabricate the dome-shaped membrane which are reflow technique and stamping technique. The comparison was made for both techniques using a Scanning Electron Microscope (SEM) and it seems the stamping technique has an advantage where the uniform thickness of the dome-shaped membrane can be achieved. The discussion on the temperature effect of a stamping technique shows that the suitable temperature to harden the PDMS is in temperature room where the bubbles can be eliminated under this temperature.

Original language	English
Title of host publication	Advances in Mechanical, Materials and Manufacturing Engineering - ICME 2014
Editors	Amir Khalid, Bukhari Manshoor, Kamil Abdullah, Waluyo Adi Siswanto, Erween Abdul Rahim, Amir Khalid, Bukhari Manshoor, Kamil Abdullah, Erween Abdul Rahim, Amir Khalid, Waluyo Adi Siswanto, Amir Khalid
Publisher	Trans Tech Publications Ltd
Pages	899-903
Number of pages	5
ISBN (Electronic)	9783038352785, 9783038352785
DOIs	https://doi.org/10.4028/www.scientific.net/AMM.660.899
Publication status	Published - 2014
Externally published	Yes
Event	5th International Conference on Mechanical and Manufacturing Engineering 2014, ICME 2014 - Bandung, Indonesia Duration: 29 Oct 2014 → 30 Oct 2014

Publication series

Name	Applied Mechanics and Materials
Volume	660
ISSN (Print)	1660-9336
ISSN (Electronic)	1662-7482

Conference

Conference	5th International Conference on Mechanical and Manufacturing Engineering 2014, ICME 2014
Country/Territory	Indonesia
City	Bandung
Period	29/10/14 → 30/10/14

Keywords

Dome-shaped
Membrane
PDMS
Soft-lithography

Access to Document

10.4028/www.scientific.net/AMM.660.899

Cite this

Mat Nawi, M. N., Manaf, A. A., Arshad, M. R., & Sidek, O. (2014). Fabrication techniques for PDMS dome-shaped membrane using soft lithography process. In A. Khalid, B. Manshoor, K. Abdullah, W. A. Siswanto, E. A. Rahim, A. Khalid, B. Manshoor, K. Abdullah, E. A. Rahim, A. Khalid, W. A. Siswanto, & A. Khalid (Eds.), Advances in Mechanical, Materials and Manufacturing Engineering - ICME 2014 (pp. 899-903). (Applied Mechanics and Materials; Vol. 660). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/AMM.660.899

Mat Nawi, Mohd Norzaidi ; Manaf, Asrulnizam Abd ; Arshad, Mohd Rizal et al. / Fabrication techniques for PDMS dome-shaped membrane using soft lithography process. Advances in Mechanical, Materials and Manufacturing Engineering - ICME 2014. editor / Amir Khalid ; Bukhari Manshoor ; Kamil Abdullah ; Waluyo Adi Siswanto ; Erween Abdul Rahim ; Amir Khalid ; Bukhari Manshoor ; Kamil Abdullah ; Erween Abdul Rahim ; Amir Khalid ; Waluyo Adi Siswanto ; Amir Khalid. Trans Tech Publications Ltd, 2014. pp. 899-903 (Applied Mechanics and Materials).

@inproceedings{14dd16637457439bb605da29ec62c8e8,

title = "Fabrication techniques for PDMS dome-shaped membrane using soft lithography process",

abstract = "The dome-shaped membrane is very important part of the micro/nano devices. The dome-shaped with the thickness of 150 μm and a radius of 3.2 mm was fabricated using the soft lithography process. The Polydimethylsiloxane (PDMS) was selected as a material because it deformable and suitable to implement as a membrane. Soft lithography is based on pattern transfer using a mold that is patterning the substrate material. In this paper, two techniques were suggested to fabricate the dome-shaped membrane which are reflow technique and stamping technique. The comparison was made for both techniques using a Scanning Electron Microscope (SEM) and it seems the stamping technique has an advantage where the uniform thickness of the dome-shaped membrane can be achieved. The discussion on the temperature effect of a stamping technique shows that the suitable temperature to harden the PDMS is in temperature room where the bubbles can be eliminated under this temperature.",

keywords = "Dome-shaped, Membrane, PDMS, Soft-lithography",

author = "{Mat Nawi}, {Mohd Norzaidi} and Manaf, {Asrulnizam Abd} and Arshad, {Mohd Rizal} and Othman Sidek",

note = "Publisher Copyright: {\textcopyright} (2014) Trans Tech Publications, Switzerland.; 5th International Conference on Mechanical and Manufacturing Engineering 2014, ICME 2014 ; Conference date: 29-10-2014 Through 30-10-2014",

year = "2014",

doi = "10.4028/www.scientific.net/AMM.660.899",

language = "English",

series = "Applied Mechanics and Materials",

publisher = "Trans Tech Publications Ltd",

pages = "899--903",

editor = "Amir Khalid and Bukhari Manshoor and Kamil Abdullah and Siswanto, {Waluyo Adi} and Rahim, {Erween Abdul} and Amir Khalid and Bukhari Manshoor and Kamil Abdullah and Rahim, {Erween Abdul} and Amir Khalid and Siswanto, {Waluyo Adi} and Amir Khalid",

booktitle = "Advances in Mechanical, Materials and Manufacturing Engineering - ICME 2014",

}

Mat Nawi, MN, Manaf, AA, Arshad, MR & Sidek, O 2014, Fabrication techniques for PDMS dome-shaped membrane using soft lithography process. in A Khalid, B Manshoor, K Abdullah, WA Siswanto, EA Rahim, A Khalid, B Manshoor, K Abdullah, EA Rahim, A Khalid, WA Siswanto & A Khalid (eds), Advances in Mechanical, Materials and Manufacturing Engineering - ICME 2014. Applied Mechanics and Materials, vol. 660, Trans Tech Publications Ltd, pp. 899-903, 5th International Conference on Mechanical and Manufacturing Engineering 2014, ICME 2014, Bandung, Indonesia, 29/10/14. https://doi.org/10.4028/www.scientific.net/AMM.660.899

Fabrication techniques for PDMS dome-shaped membrane using soft lithography process. / Mat Nawi, Mohd Norzaidi; Manaf, Asrulnizam Abd; Arshad, Mohd Rizal et al.
Advances in Mechanical, Materials and Manufacturing Engineering - ICME 2014. ed. / Amir Khalid; Bukhari Manshoor; Kamil Abdullah; Waluyo Adi Siswanto; Erween Abdul Rahim; Amir Khalid; Bukhari Manshoor; Kamil Abdullah; Erween Abdul Rahim; Amir Khalid; Waluyo Adi Siswanto; Amir Khalid. Trans Tech Publications Ltd, 2014. p. 899-903 (Applied Mechanics and Materials; Vol. 660).

Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review

TY - GEN

T1 - Fabrication techniques for PDMS dome-shaped membrane using soft lithography process

AU - Mat Nawi, Mohd Norzaidi

AU - Manaf, Asrulnizam Abd

AU - Arshad, Mohd Rizal

AU - Sidek, Othman

N1 - Publisher Copyright: © (2014) Trans Tech Publications, Switzerland.

PY - 2014

Y1 - 2014

N2 - The dome-shaped membrane is very important part of the micro/nano devices. The dome-shaped with the thickness of 150 μm and a radius of 3.2 mm was fabricated using the soft lithography process. The Polydimethylsiloxane (PDMS) was selected as a material because it deformable and suitable to implement as a membrane. Soft lithography is based on pattern transfer using a mold that is patterning the substrate material. In this paper, two techniques were suggested to fabricate the dome-shaped membrane which are reflow technique and stamping technique. The comparison was made for both techniques using a Scanning Electron Microscope (SEM) and it seems the stamping technique has an advantage where the uniform thickness of the dome-shaped membrane can be achieved. The discussion on the temperature effect of a stamping technique shows that the suitable temperature to harden the PDMS is in temperature room where the bubbles can be eliminated under this temperature.

AB - The dome-shaped membrane is very important part of the micro/nano devices. The dome-shaped with the thickness of 150 μm and a radius of 3.2 mm was fabricated using the soft lithography process. The Polydimethylsiloxane (PDMS) was selected as a material because it deformable and suitable to implement as a membrane. Soft lithography is based on pattern transfer using a mold that is patterning the substrate material. In this paper, two techniques were suggested to fabricate the dome-shaped membrane which are reflow technique and stamping technique. The comparison was made for both techniques using a Scanning Electron Microscope (SEM) and it seems the stamping technique has an advantage where the uniform thickness of the dome-shaped membrane can be achieved. The discussion on the temperature effect of a stamping technique shows that the suitable temperature to harden the PDMS is in temperature room where the bubbles can be eliminated under this temperature.

KW - Dome-shaped

KW - Membrane

KW - PDMS

KW - Soft-lithography

UR - http://www.scopus.com/inward/record.url?scp=84921651707&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/AMM.660.899

DO - 10.4028/www.scientific.net/AMM.660.899

M3 - Conference Proceeding

AN - SCOPUS:84921651707

T3 - Applied Mechanics and Materials

SP - 899

EP - 903

BT - Advances in Mechanical, Materials and Manufacturing Engineering - ICME 2014

A2 - Khalid, Amir

A2 - Manshoor, Bukhari

A2 - Abdullah, Kamil

A2 - Siswanto, Waluyo Adi

A2 - Rahim, Erween Abdul

A2 - Khalid, Amir

A2 - Manshoor, Bukhari

A2 - Abdullah, Kamil

A2 - Rahim, Erween Abdul

A2 - Khalid, Amir

A2 - Siswanto, Waluyo Adi

A2 - Khalid, Amir

PB - Trans Tech Publications Ltd

T2 - 5th International Conference on Mechanical and Manufacturing Engineering 2014, ICME 2014

Y2 - 29 October 2014 through 30 October 2014

ER -

Mat Nawi MN, Manaf AA, Arshad MR, Sidek O. Fabrication techniques for PDMS dome-shaped membrane using soft lithography process. In Khalid A, Manshoor B, Abdullah K, Siswanto WA, Rahim EA, Khalid A, Manshoor B, Abdullah K, Rahim EA, Khalid A, Siswanto WA, Khalid A, editors, Advances in Mechanical, Materials and Manufacturing Engineering - ICME 2014. Trans Tech Publications Ltd. 2014. p. 899-903. (Applied Mechanics and Materials). doi: 10.4028/www.scientific.net/AMM.660.899

Fabrication techniques for PDMS dome-shaped membrane using soft lithography process

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this