Enhanced Biased Radiation and Illumination Stress Stability of Solution-processed AlOx Dielectrics using Hydrogen Peroxide

Y. X. Fang, T. S. Zhao, C. Zhao*, C. Z. Zhao*, I. Z. Mitrovic, L. Yang

*Corresponding author for this work

Research output: Chapter in Book or Report/Conference proceedingConference Proceedingpeer-review

2 Citations (Scopus)

Abstract

In this work, the effect of hydrogen peroxide (HO) on the biased radiation stress (BRS) and biased illumination stress (BIS) stability of solution-processed AlOx thin films were investigated. It is found that the BRS and BIS stabilities, as well as the leakage behavior were significantly improved through employing HO in the solution-process. Through the TGA-DSC analysis of the precursor powder with and without the presence of HO, we assumed that HO effectively reduced the oxygen vacancy defect density by strong oxidation and minimizes defects by eliminating the impurities at lower temperatures compared to a conventional solution process.

Original languageEnglish
Title of host publication17th IEEE International Conference on IC Design and Technology, ICICDT 2019 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728118536
DOIs
Publication statusPublished - Jun 2019
Event17th IEEE International Conference on IC Design and Technology, ICICDT 2019 - Suzhou, China
Duration: 17 Jun 201919 Jun 2019

Publication series

Name17th IEEE International Conference on IC Design and Technology, ICICDT 2019 - Proceedings

Conference

Conference17th IEEE International Conference on IC Design and Technology, ICICDT 2019
Country/TerritoryChina
CitySuzhou
Period17/06/1919/06/19

Keywords

  • aluminum oxide
  • biased illumination stress (BIS)
  • biased radiation stress (BRS)
  • hydrogen peroxide
  • solution-process
  • stability (key words)

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