Eco-Friendly, Low-temperature Solution-processed InO/A1oThin-film Transistor with Li-incorporation

T. S. Zhao, C. Zhao, C. Z. Zhao*, W. Y. Xu, L. Yang, I. Z. Mitrovic, S. Hall, E. G. Lim, S. C. Yu

*Corresponding author for this work

Research output: Chapter in Book or Report/Conference proceedingConference Proceedingpeer-review

Abstract

In this work, we investigate an eco-friendly route of fabricating solution-processed thin-film transistors (TFTs). With Li incorporation in the indium oxide (InO) semiconductor layer, the annealing temperature can be lowered to 200°C. The combination with a solution processed high-k aluminum oxide (A1O) dielectric layer, produces a TFT field effect mobility with average value of 20.5 cm2·V-1·s-1 from 30 samples, which is a promising result for future applications.

Original languageEnglish
Title of host publication2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, EUROSOI-ULIS 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728116587
DOIs
Publication statusPublished - Apr 2019
Event2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, EUROSOI-ULIS 2019 - Grenoble, France
Duration: 1 Apr 20193 Apr 2019

Publication series

Name2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, EUROSOI-ULIS 2019

Conference

Conference2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon, EUROSOI-ULIS 2019
Country/TerritoryFrance
CityGrenoble
Period1/04/193/04/19

Keywords

  • InO
  • Li incorporation
  • TFT
  • component
  • solution process

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