Dielectric relaxation model in high-k materials: Simplified Kohlrausch-Williams-Watts function

Peng Fei Wang*, Chun Zhao, Ce Zhou Zhao, Gang Liu

*Corresponding author for this work

Research output: Chapter in Book or Report/Conference proceedingConference Proceedingpeer-review

Abstract

The dielectric relaxation in the high-k materials, which would cause the metal-oxide-semiconductor field-effect transistor deterioration, is able to be fitted by several models. A novel model is proposed to simplify the original Kohlrausch-Williams-Watts (KWW) model. The proposed model has an analytical expression respectively in both high and low frequency domain. A critical comparison is made between the simplified model and the original model. The simplified KWW model is able to describe the dielectric relaxation data of high-k materials to a high degree of accuracy.

Original languageEnglish
Title of host publicationICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, Proceedings
DOIs
Publication statusPublished - 2012
Event2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2012 - Xi'an, China
Duration: 29 Oct 20121 Nov 2012

Publication series

NameICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, Proceedings

Conference

Conference2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2012
Country/TerritoryChina
CityXi'an
Period29/10/121/11/12

Cite this