CMOS-compatible Si3N4 Optical Waveguides: An Electromagnetic Study of the Influence of SiO2 Cladding and Resistive Si Substrate

^*Corresponding author for this work

Research output: Contribution to conference › Paper › peer-review

Original language	English
Publication status	Submitted - 2 Nov 2024
Event	2024 Asia Communication and Photonics Conference - Beijing, China Duration: 2 Nov 2024 → 5 Nov 2024 https://www.acpconf.com/

Conference	2024 Asia Communication and Photonics Conference
Abbreviated title	ACP 2024
Country/Territory	China
City	Beijing
Period	2/11/24 → 5/11/24
Internet address	https://www.acpconf.com/

Cite this

@conference{9eb770388a0442abb7e2694733a9ce8b,

title = "CMOS-compatible Si3N4 Optical Waveguides: An Electromagnetic Study of the Influence of SiO2 Cladding and Resistive Si Substrate",

author = "Wenli Zhou and Rui Yao and Sang Lam",

year = "2024",

month = nov,

day = "2",

language = "English",

note = "2024 Asia Communication and Photonics Conference, ACP 2024 ; Conference date: 02-11-2024 Through 05-11-2024",

url = "https://www.acpconf.com/",

}