CMOS-compatible Si3N4 Optical Waveguides: An Electromagnetic Study for Fabrication Considerations of SiO2 Cladding and Silicon Wafer Choice

Wenli Zhou; Rui Yao; Sang Lam

CMOS-compatible Si3N4 Optical Waveguides: An Electromagnetic Study for Fabrication Considerations of SiO2 Cladding and Silicon Wafer Choice

^*Corresponding author for this work

Research output: Contribution to conference › Paper › peer-review

Original language	English
Publication status	Accepted/In press - 9 Mar 2025
Event	2025 The 9th IEEE Electron Devices Technology and Manufacturing Conference - Hong Kong, China Duration: 9 Mar 2025 → 12 Mar 2025 https://edtm2025.com/

Conference

Conference	2025 The 9th IEEE Electron Devices Technology and Manufacturing Conference
Abbreviated title	EDTM 2025
Country/Territory	China
City	Hong Kong
Period	9/03/25 → 12/03/25
Internet address	https://edtm2025.com/

Cite this

@conference{9eb770388a0442abb7e2694733a9ce8b,

title = "CMOS-compatible Si3N4 Optical Waveguides: An Electromagnetic Study for Fabrication Considerations of SiO2 Cladding and Silicon Wafer Choice",

author = "Wenli Zhou and Rui Yao and Sang Lam",

year = "2025",

month = mar,

day = "9",

language = "English",

note = "2025 The 9th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2025 ; Conference date: 09-03-2025 Through 12-03-2025",

url = "https://edtm2025.com/",

}