An evolutionary approach for robust layout synthesis of MEMS

The chapter introduces a robust design method for layout synthesis of micro-electro-mechanical (MEM) resonators subject to inherent geometric uncertainties such as the fabrication error on the sidewall of the structure. The robust design problem is formulated as a multi-objective constrained optimisation problem with certain assumptions and treated by a special constrained genetic algorithm. Case studies based on layout synthesis of a crableg resonator and a comb-driven micro-resonator show that the approach proposed in this chapter can lead to design results that meet the target performance and are less sensitive to geometric uncertainties than typical designs.