An Electromagnetic Study of Scalability of CMOS-compatible Si3N4 Optical Waveguides for Nanophotonics on a Silicon Substrate

Wenli Zhou, Rui Yao*, Sang Lam*

*Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

Original languageEnglish
Publication statusAccepted/In press - 6 Jan 2025
Event2025 10th IEEE International Nanoelectronics Conference - Tamsui, Taipei, Taiwan, Province of China
Duration: 3 Jan 20256 Jan 2025
https://ieeeinec.org/

Conference

Conference2025 10th IEEE International Nanoelectronics Conference
Abbreviated titleINEC 2025
Country/TerritoryTaiwan, Province of China
CityTaipei
Period3/01/256/01/25
Internet address

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