TY - GEN
T1 - A High-Resolution Self-powered Flexible Pressure Sensor Matrix Based on ZnO Nanowires
AU - Lu, Qifeng
AU - Sun, Fuqin
AU - Li, Lili
AU - Wang, Zihao
AU - Zhang, Ting
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/4/25
Y1 - 2021/4/25
N2 - Flexible pressure sensor matrix, which can perceive the external mechanical stimuli with high spatial resolution, is the essential component for the electronic skin (E-skin) and is also able to be applied in various areas such as health monitoring and disease diagnosis. However, the design and fabrication of high-resolution pressure sensors with a high linearity in medium pressure range (10 kPa-100 kPa) at no power consumption is seldom reported. Here, we fabricate a self-powered pressure sensor matrix based on wurtzite structured ZnO nanowires (NWs) grown by hydrothermal method. The geometry and density of ZnO NWs were analyzed using a finite element method (FEM) to optimize the sensing performance. The matrix with an area of 25 mm consists of 25 sensors with the dimension of each unit being 500 μm ∗ 500 μm (density of 100/cm). Each sensor can be accessed independently and shows a linear response for the pressure ranging from 15 kPa to 50 kPa. The proposed self-powered pressure sensor matrix in this study shows a great potential in the application of wearable devices.
AB - Flexible pressure sensor matrix, which can perceive the external mechanical stimuli with high spatial resolution, is the essential component for the electronic skin (E-skin) and is also able to be applied in various areas such as health monitoring and disease diagnosis. However, the design and fabrication of high-resolution pressure sensors with a high linearity in medium pressure range (10 kPa-100 kPa) at no power consumption is seldom reported. Here, we fabricate a self-powered pressure sensor matrix based on wurtzite structured ZnO nanowires (NWs) grown by hydrothermal method. The geometry and density of ZnO NWs were analyzed using a finite element method (FEM) to optimize the sensing performance. The matrix with an area of 25 mm consists of 25 sensors with the dimension of each unit being 500 μm ∗ 500 μm (density of 100/cm). Each sensor can be accessed independently and shows a linear response for the pressure ranging from 15 kPa to 50 kPa. The proposed self-powered pressure sensor matrix in this study shows a great potential in the application of wearable devices.
UR - http://www.scopus.com/inward/record.url?scp=85113293766&partnerID=8YFLogxK
U2 - 10.1109/NEMS51815.2021.9451476
DO - 10.1109/NEMS51815.2021.9451476
M3 - Conference Proceeding
AN - SCOPUS:85113293766
T3 - Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021
SP - 1279
EP - 1282
BT - Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021
Y2 - 25 April 2021 through 29 April 2021
ER -