一种等离子体增强型溶液燃烧法制备的薄膜晶体管及方法

Translated title of the contribution: Film transistor prepared by plasma enhanced solution combustion method and preparation method

Qihan Liu (Inventor), Chun Zhao (Inventor), Cezhou Zhao (Inventor), Li Yang (Inventor)

Research output: Patent

Translated title of the contributionFilm transistor prepared by plasma enhanced solution combustion method and preparation method
Original languageChinese (Simplified)
Patent granted numberCN110400837B
Validity date26/06/39
Publication statusPublished - 11 Apr 2023

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