Translated title of the contribution | Film transistor prepared by plasma enhanced solution combustion method and preparation method |
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Original language | Chinese (Simplified) |
Patent granted number | CN110400837B |
Validity date | 26/06/39 |
Publication status | Published - 11 Apr 2023 |
一种等离子体增强型溶液燃烧法制备的薄膜晶体管及方法
Research output: Patent