Vibratory response of diamond-like amorphous carbon cantilevers under different temperatures

Daniel H.C. Chua, B. K. Tay*, P. Zhang, E. H.T. Teo, L. T.W. Lim, S. O'Shea, J. Miao, W. I. Milne

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

4 Citations (Scopus)


Diamond-like amorphous carbon films were deposited using filtered cathodic vacuum arc (FCVA) with the plasma ion immersion implantation (PIII) system. A unique multilayer film, comprising of alternating high-sp3 content (90%), high-stress (9 GPa) films, low-sp3 content (50%), and low-stress films (<0.5 GPa), was fabricated. By alternating these layers, a 1.5-μm-thick film was subsequently deposited. Free-standing microcantilevers measuring 150×50 μm had been subsequently fabricated by using standard lithography and wet etching. The resonance frequency of the microcantilevers was measured by a vacuum laser vibrometer system to be 109.5 kHz. After gradual heating to 240°C, the resonance frequency was observed to increase to a high of 111.5 kHz.

Original languageEnglish
Pages (from-to)1980-1983
Number of pages4
JournalDiamond and Related Materials
Issue number11-12
Publication statusPublished - Nov 2004
Externally publishedYes
EventProceedings of the 9th International Conference on New Diamond - Tokyo, Japan
Duration: 26 Mar 200429 Mar 2004


  • Annealing
  • DLC microcantilevers
  • Diamond-like amorphous carbon
  • Intrinsic stress
  • Microcantilevers
  • Resonance frequency

Cite this