Versailles Project on Advanced Materials and Standards interlaboratory study on intensity calibration for x-ray photoelectron spectroscopy instruments using low-density polyethylene

Benjamen P. Reed*, David J.H. Cant, Steve J. Spencer, Abraham Jorge Carmona-Carmona, Adam Bushell, Alberto Herrera-Gómez, Akira Kurokawa, Andreas Thissen, Andrew G. Thomas, Andrew J. Britton, Andrzej Bernasik, Anne Fuchs, Arthur P. Baddorf, Bernd Bock, Bill Theilacker, Bin Cheng, David G. Castner, David J. Morgan, David Valley, Elizabeth A. WillneffEmily F. Smith, Emmanuel Nolot, Fangyan Xie, Gilad Zorn, Graham C. Smith, Hideyuki Yasufuku, Jeffery L. Fenton, Jian Chen, Jonathan D.P. Counsell, Jörg Radnik, Karen J. Gaskell, Kateryna Artyushkova, Li Yang, Lulu Zhang, Makiho Eguchi, Marc Walker, Mariusz Hajdyła, Mateusz M. Marzec, Matthew R. Linford, Naoyoshi Kubota, Orlando Cortazar-Martínez, Paul Dietrich, Riki Satoh, Sven L.M. Schroeder, Tahereh G. Avval, Takaharu Nagatomi, Vincent Fernandez, Wayne Lake, Yasushi Azuma, Yusuke Yoshikawa, Alexander G. Shard

*Corresponding author for this work

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17 Citations (Scopus)


We report the results of a Versailles Project on Advanced Materials and Standards interlaboratory study on the intensity scale calibration of x-ray photoelectron spectrometers using low-density polyethylene (LDPE) as an alternative material to gold, silver, and copper. An improved set of LDPE reference spectra, corrected for different instrument geometries using a quartz-monochromated Al Kα x-ray source, was developed using data provided by participants in this study. Using these new reference spectra, a transmission function was calculated for each dataset that participants provided. When compared to a similar calibration procedure using the NPL reference spectra for gold, the LDPE intensity calibration method achieves an absolute offset of ∼3.0% and a systematic deviation of ±6.5% on average across all participants. For spectra recorded at high pass energies (≥90 eV), values of absolute offset and systematic deviation are ∼5.8% and ±5.7%, respectively, whereas for spectra collected at lower pass energies (<90 eV), values of absolute offset and systematic deviation are ∼4.9% and ±8.8%, respectively; low pass energy spectra perform worse than the global average, in terms of systematic deviations, due to diminished count rates and signal-to-noise ratio. Differences in absolute offset are attributed to the surface roughness of the LDPE induced by sample preparation. We further assess the usability of LDPE as a secondary reference material and comment on its performance in the presence of issues such as variable dark noise, x-ray warm up times, inaccuracy at low count rates, and underlying spectrometer problems. In response to participant feedback and the results of the study, we provide an updated LDPE intensity calibration protocol to address the issues highlighted in the interlaboratory study. We also comment on the lack of implementation of a consistent and traceable intensity calibration method across the community of x-ray photoelectron spectroscopy (XPS) users and, therefore, propose a route to achieving this with the assistance of instrument manufacturers, metrology laboratories, and experts leading to an international standard for XPS intensity scale calibration.

Original languageEnglish
Article number577
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number6
Publication statusPublished - 1 Dec 2020

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