Measurement of nanoscale surface patterns produced by two-beam laser interference lithography

Haiyan Pan*, Lanjiao Liu, Jia Xu, Hongmei Xu, Zhengxun Song, Zhankun Weng, Zhen Hu, Jin Zhang, Yong Yue, Dayou Li, Zuobin Wang

*Corresponding author for this work

Research output: Chapter in Book or Report/Conference proceedingConference Proceedingpeer-review

1 Citation (Scopus)

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