Frequency dispersion and dielectric relaxation of La2 Hf2 O7

C. Z. Zhao, S. Taylor, M. Werner, P. R. Chalker, J. M. Gaskell, A. C. Jones

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

Thin films of La2 Hf2 O7 have been deposited by liquid injection atomic layer deposition and post-deposition annealed at 900 °C. The dielectric frequency dispersion was more serious for thinner films which is attributed to the effect of a lossy interfacial layer between the La2 Hf2 O7 dielectric and silicon substrate. The effect of the interfacial layer was modeled based on a dual-frequency measurement technique. The dielectric relaxation of the La2 Hf2 O7 thin films was modelled using both the Curie-von Schweidler and Havriliak-Negami relationships. Post deposition annealing in nitrogen at 900 °C for 15 min improved dielectric relaxation and reduced the dielectric loss.

Original languageEnglish
Pages (from-to)333-337
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume27
Issue number1
DOIs
Publication statusPublished - 2009

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