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Five-beam interference pattern model for laser interference lithography
Xiangying Deng*, Zhen Hu, Guowei Xiu, Zhengxun Song, Zhankun Weng, Jia Xu, Dayou Li, Yong Yue, Zuobin Wang
*Corresponding author for this work
Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review
11
Citations
(Scopus)