@inproceedings{3b216de483824e8e89fc6f895d4698b7,
title = "Five-beam interference pattern model for laser interference lithography",
abstract = "Laser interference lithography (LIL) is an established fabrication technology for micro and nano scale structuring of periodic and quasi-periodic surface patterns. This paper presents a Five-beam Interference Pattern Model for laser interference lithography. It can be programmed to obtain images of interference results showing interference intensity distributions. The majority of 2-5 beam interference patterns can be simulated by this model with every variable in an LIL system. In this work, different technologies for nano structuring are introduced, along with the principle of the five-beam interference pattern model. Several images of interference results obtained by the five-beam interference pattern model are shown and some of their possible applications are discussed. Three-beam interference patterns and five-beam interference patterns are formed using a laser beam that goes along the z axis which is not used commonly in other LIL models.",
keywords = "Five-beam interference pattern model, Laser interference lithography, Nano patterning, Nano structuring",
author = "Xiangying Deng and Zhen Hu and Guowei Xiu and Zhengxun Song and Zhankun Weng and Jia Xu and Dayou Li and Yong Yue and Zuobin Wang",
year = "2010",
doi = "10.1109/ICINFA.2010.5512128",
language = "English",
isbn = "9781424457021",
series = "2010 IEEE International Conference on Information and Automation, ICIA 2010",
pages = "1208--1213",
booktitle = "2010 IEEE International Conference on Information and Automation, ICIA 2010",
note = "2010 IEEE International Conference on Information and Automation, ICIA 2010 ; Conference date: 20-06-2010 Through 23-06-2010",
}