Deep learning in optical metrology: a review

Chao Zuo*, Jiaming Qian, Shijie Feng, Wei Yin, Yixuan Li, Pengfei Fan, Jing Han, Kemao Qian*, Qian Chen*

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review

465 Citations (Scopus)

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