Antireflection silicon structures with hydrophobic property fabricated by three-beam laser interference

L. Zhao, Z. Wang*, J. Zhang, L. Cao, L. Li, Y. Yue, D. Li

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

39 Citations (Scopus)


This paper demonstrates antireflective structures on silicon wafer surfaces with hydrophobic property fabricated by three-beam laser interference. In this work, a three-beam laser interference system was set up to generate periodic micro-nano hole structures with hexagonal distributions. Compared with the existing technologies, the array of hexagonally-distributed hole structures fabricated by three-beam laser interference reveals a design guideline to achieve considerably low solar-weighted reflectance (SWR) in the wavelength range of 300-780 nm. The resulting periodic hexagonally-distributed hole structures have shown extremely low SWR (1.86%) and relatively large contact angle (140°) providing with a self-cleaning capability on the solar cell surface.

Original languageEnglish
Pages (from-to)574-579
Number of pages6
JournalApplied Surface Science
Publication statusPublished - 15 Aug 2015


  • Antireflection
  • Hexagonal structures
  • Self-cleaning
  • Solar cell
  • Three-beam laser interference

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