An evolutionary approach for robust layout synthesis of MEMS

Zhun Fan*, Jiachuan Wang, Min Wen, Erik Goodman, Ronald Rosenberg

*Corresponding author for this work

Research output: Chapter in Book or Report/Conference proceedingChapterpeer-review

1 Citation (Scopus)


The chapter introduces a robust design method for layout synthesis of micro-electro-mechanical (MEM) resonators subject to inherent geometric uncertainties such as the fabrication error on the sidewall of the structure. The robust design problem is formulated as a multi-objective constrained optimisation problem with certain assumptions and treated by a special constrained genetic algorithm. Case studies based on layout synthesis of a crableg resonator and a comb-driven micro-resonator show that the approach proposed in this chapter can lead to design results that meet the target performance and are less sensitive to geometric uncertainties than typical designs.

Original languageEnglish
Title of host publicationEvolutionary Computation in Dynamic and Uncertain Environments
EditorsShengxiang Yang, Yew-Soong Ong, Yaochu Jin
Number of pages24
Publication statusPublished - 2007
Externally publishedYes

Publication series

NameStudies in Computational Intelligence
ISSN (Print)1860-949X

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