A Flexible Framework Based on Finite-Element Method for Capacitance Extraction of 3-Dimensional Interconnects

Qiwen Zheng, Ye Wu*, Zi Chang Zhang

*Corresponding author for this work

Research output: Chapter in Book or Report/Conference proceedingConference Proceedingpeer-review

Original languageEnglish
Title of host publication2024 IEEE International Conference on Semiconductor Electronics (ICSE)
Publication statusAccepted/In press - 2024

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