一种主动式压力传感器及其制备方法

Translated title of the contribution: Active pressure sensor and preparation method thereof

Xiaoping Chen (Inventor), Yina Liu (Inventor), Zhen Wen (Inventor), Chun Zhao (Inventor), Cezhou Zhao (Inventor)

Research output: Patent

Translated title of the contributionActive pressure sensor and preparation method thereof
Original languageChinese (Simplified)
Patent granted numberCN113074840B
Validity date30/03/41
Publication statusPublished - 24 Mar 2023

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