Reliability of Hafnium Oxide Dielectric Thin Film Transistor Devices Prepared by Solution Method

  • Zhao, Chun (PI)
  • Zhao, Cezhou (Team member)
  • Liu, Qihan (Team member)
  • Zhao, Tianshi (Team member)
  • Fang, Yuxiao (Team member)
  • Shen, Zongjie (Team member)

Project: Governmental Research Project

Project Details

Project Title (In Chinese)

基于溶液法制备的氧铪介电层薄膜晶体管器件可靠性研究

Fund Amount (RMB)

30000.00
Project CategoryThe Natural Science Foundation of the Jiangsu Higher Education Institutions of China: General Programme
StatusFinished
Effective start/end date1/09/1931/08/21

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