Whispering Gallery Modes of CMOS-compatible Si3N4 Microdisk Resonators: A Computational Study for 3D Nanophotonics on a Silicon Substrate

Wenli Zhou, Sang Lam^*

^*Corresponding author for this work

Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review

Original language	English
Title of host publication	The 30th Annual International Conference on Optical MEMS and Nanophotonics 2025 (OMN 2025)
Publisher	Institute of Electrical and Electronics Engineers Inc.
Publication status	Published - 13 Jul 2025

Cite this

@inproceedings{a8390b03b56e4551833eda70a83baffa,

title = "Whispering Gallery Modes of CMOS-compatible Si3N4 Microdisk Resonators: A Computational Study for 3D Nanophotonics on a Silicon Substrate",

author = "Wenli Zhou and Sang Lam",

year = "2025",

month = jul,

day = "13",

language = "English",

booktitle = "The 30th Annual International Conference on Optical MEMS and Nanophotonics 2025 (OMN 2025)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

Whispering Gallery Modes of CMOS-compatible Si3N4 Microdisk Resonators: A Computational Study for 3D Nanophotonics on a Silicon Substrate. / Zhou, Wenli; Lam, Sang.
The 30th Annual International Conference on Optical MEMS and Nanophotonics 2025 (OMN 2025). Institute of Electrical and Electronics Engineers Inc., 2025.

Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review

TY - GEN

T1 - Whispering Gallery Modes of CMOS-compatible Si3N4 Microdisk Resonators: A Computational Study for 3D Nanophotonics on a Silicon Substrate

AU - Zhou, Wenli

AU - Lam, Sang

PY - 2025/7/13

Y1 - 2025/7/13

UR - https://doi.org/10.1109/OMN65869.2025.11125999

M3 - Conference Proceeding

BT - The 30th Annual International Conference on Optical MEMS and Nanophotonics 2025 (OMN 2025)

PB - Institute of Electrical and Electronics Engineers Inc.

ER -