Vibratory response of diamond-like amorphous carbon cantilevers under different temperatures

Daniel H.C. Chua; B. K. Tay; P. Zhang; E. H.T. Teo; L. T.W. Lim; S. O'Shea; J. Miao; W. I. Milne

doi:10.1016/j.diamond.2004.08.002

Vibratory response of diamond-like amorphous carbon cantilevers under different temperatures

Daniel H.C. Chua
, B. K. Tay^*
, P. Zhang
, E. H.T. Teo
, L. T.W. Lim
, S. O'Shea
, J. Miao
, W. I. Milne

^*Corresponding author for this work

University of Cambridge
Nanyang Technological University
Agency for Science, Technology and Research, Singapore

Research output: Contribution to journal › Conference article › peer-review

4 Citations (Scopus)

Abstract

Diamond-like amorphous carbon films were deposited using filtered cathodic vacuum arc (FCVA) with the plasma ion immersion implantation (PIII) system. A unique multilayer film, comprising of alternating high-sp³ content (90%), high-stress (9 GPa) films, low-sp³ content (50%), and low-stress films (<0.5 GPa), was fabricated. By alternating these layers, a 1.5-μm-thick film was subsequently deposited. Free-standing microcantilevers measuring 150×50 μm had been subsequently fabricated by using standard lithography and wet etching. The resonance frequency of the microcantilevers was measured by a vacuum laser vibrometer system to be 109.5 kHz. After gradual heating to 240°C, the resonance frequency was observed to increase to a high of 111.5 kHz.

Original language	English
Pages (from-to)	1980-1983
Number of pages	4
Journal	Diamond and Related Materials
Volume	13
Issue number	11-12
DOIs	https://doi.org/10.1016/j.diamond.2004.08.002
Publication status	Published - Nov 2004
Externally published	Yes
Event	Proceedings of the 9th International Conference on New Diamond - Tokyo, Japan Duration: 26 Mar 2004 → 29 Mar 2004

Keywords

Annealing
DLC microcantilevers
Diamond-like amorphous carbon
Intrinsic stress
Microcantilevers
Resonance frequency

Access to Document

10.1016/j.diamond.2004.08.002

Cite this

@article{de80d0bc99a74d76a4ecd54095c54fc6,

title = "Vibratory response of diamond-like amorphous carbon cantilevers under different temperatures",

abstract = "Diamond-like amorphous carbon films were deposited using filtered cathodic vacuum arc (FCVA) with the plasma ion immersion implantation (PIII) system. A unique multilayer film, comprising of alternating high-sp3 content (90\%), high-stress (9 GPa) films, low-sp3 content (50\%), and low-stress films (<0.5 GPa), was fabricated. By alternating these layers, a 1.5-μm-thick film was subsequently deposited. Free-standing microcantilevers measuring 150×50 μm had been subsequently fabricated by using standard lithography and wet etching. The resonance frequency of the microcantilevers was measured by a vacuum laser vibrometer system to be 109.5 kHz. After gradual heating to 240°C, the resonance frequency was observed to increase to a high of 111.5 kHz.",

keywords = "Annealing, DLC microcantilevers, Diamond-like amorphous carbon, Intrinsic stress, Microcantilevers, Resonance frequency",

author = "Chua, \{Daniel H.C.\} and Tay, \{B. K.\} and P. Zhang and Teo, \{E. H.T.\} and Lim, \{L. T.W.\} and S. O'Shea and J. Miao and Milne, \{W. I.\}",

note = "Funding Information: This project is partially funded via the CMI initiative through project 059/P-MEMS. The authors (D.H.C. Chua and W.I. Milne) would like to acknowledge partial funding by the EPSRC carbon-based Electronic (CBE) program. The authors shall like to thank Mr. K.S. Tang for help with the clean-room process.; Proceedings of the 9th International Conference on New Diamond ; Conference date: 26-03-2004 Through 29-03-2004",

year = "2004",

month = nov,

doi = "10.1016/j.diamond.2004.08.002",

language = "English",

volume = "13",

pages = "1980--1983",

journal = "Diamond and Related Materials",

issn = "0925-9635",

number = "11-12",

}

TY - JOUR

T1 - Vibratory response of diamond-like amorphous carbon cantilevers under different temperatures

AU - Chua, Daniel H.C.

AU - Tay, B. K.

AU - Zhang, P.

AU - Teo, E. H.T.

AU - Lim, L. T.W.

AU - O'Shea, S.

AU - Miao, J.

AU - Milne, W. I.

N1 - Funding Information: This project is partially funded via the CMI initiative through project 059/P-MEMS. The authors (D.H.C. Chua and W.I. Milne) would like to acknowledge partial funding by the EPSRC carbon-based Electronic (CBE) program. The authors shall like to thank Mr. K.S. Tang for help with the clean-room process.

PY - 2004/11

Y1 - 2004/11

N2 - Diamond-like amorphous carbon films were deposited using filtered cathodic vacuum arc (FCVA) with the plasma ion immersion implantation (PIII) system. A unique multilayer film, comprising of alternating high-sp3 content (90%), high-stress (9 GPa) films, low-sp3 content (50%), and low-stress films (<0.5 GPa), was fabricated. By alternating these layers, a 1.5-μm-thick film was subsequently deposited. Free-standing microcantilevers measuring 150×50 μm had been subsequently fabricated by using standard lithography and wet etching. The resonance frequency of the microcantilevers was measured by a vacuum laser vibrometer system to be 109.5 kHz. After gradual heating to 240°C, the resonance frequency was observed to increase to a high of 111.5 kHz.

AB - Diamond-like amorphous carbon films were deposited using filtered cathodic vacuum arc (FCVA) with the plasma ion immersion implantation (PIII) system. A unique multilayer film, comprising of alternating high-sp3 content (90%), high-stress (9 GPa) films, low-sp3 content (50%), and low-stress films (<0.5 GPa), was fabricated. By alternating these layers, a 1.5-μm-thick film was subsequently deposited. Free-standing microcantilevers measuring 150×50 μm had been subsequently fabricated by using standard lithography and wet etching. The resonance frequency of the microcantilevers was measured by a vacuum laser vibrometer system to be 109.5 kHz. After gradual heating to 240°C, the resonance frequency was observed to increase to a high of 111.5 kHz.

KW - Annealing

KW - DLC microcantilevers

KW - Diamond-like amorphous carbon

KW - Intrinsic stress

KW - Microcantilevers

KW - Resonance frequency

UR - https://www.scopus.com/pages/publications/7544241301

U2 - 10.1016/j.diamond.2004.08.002

DO - 10.1016/j.diamond.2004.08.002

M3 - Conference article

AN - SCOPUS:7544241301

SN - 0925-9635

VL - 13

SP - 1980

EP - 1983

JO - Diamond and Related Materials

JF - Diamond and Related Materials

IS - 11-12

T2 - Proceedings of the 9th International Conference on New Diamond

Y2 - 26 March 2004 through 29 March 2004

ER -

Vibratory response of diamond-like amorphous carbon cantilevers under different temperatures

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this