“Top-down” and “bottom-up” strategies for wafer-scaled miniaturized gas sensors design and fabrication

Lin Liu, Yingyi Wang, Fuqin Sun, Yanbing Dai, Shuqi Wang, Yuanyuan Bai, Lianhui Li, Tie Li, Ting Zhang, Sujie Qin*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

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