Si3N4 Microdisk Resonators for Silicon Photonics: An Electromagnetic Study of the Influence of SiO2 Cladding and the Silicon Substrate

^*Corresponding author for this work

Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review

Original language	English
Title of host publication	IEEE 2025 The 10th Optoelectronics Global Conference (OGC 2025)
Publisher	Institute of Electrical and Electronics Engineers Inc.
DOIs	https://doi.org/10.1109/OGC66041.2025.11262057
Publication status	Published - 2 Dec 2025

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@inproceedings{15858eb72bec414f931c7f84bfc437aa,

title = "Si3N4 Microdisk Resonators for Silicon Photonics: An Electromagnetic Study of the Influence of SiO2 Cladding and the Silicon Substrate",

author = "Wenli Zhou and Sang Lam",

year = "2025",

month = dec,

day = "2",

doi = "10.1109/OGC66041.2025.11262057",

language = "English",

booktitle = "IEEE 2025 The 10th Optoelectronics Global Conference (OGC 2025)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

Si3N4 Microdisk Resonators for Silicon Photonics: An Electromagnetic Study of the Influence of SiO2 Cladding and the Silicon Substrate. / Zhou, Wenli; Lam, Sang.
IEEE 2025 The 10th Optoelectronics Global Conference (OGC 2025). Institute of Electrical and Electronics Engineers Inc., 2025.

Research output: Chapter in Book or Report/Conference proceeding › Conference Proceeding › peer-review

TY - GEN

T1 - Si3N4 Microdisk Resonators for Silicon Photonics: An Electromagnetic Study of the Influence of SiO2 Cladding and the Silicon Substrate

AU - Zhou, Wenli

AU - Lam, Sang

PY - 2025/12/2

Y1 - 2025/12/2

U2 - 10.1109/OGC66041.2025.11262057

DO - 10.1109/OGC66041.2025.11262057

M3 - Conference Proceeding

BT - IEEE 2025 The 10th Optoelectronics Global Conference (OGC 2025)

PB - Institute of Electrical and Electronics Engineers Inc.

ER -